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1

Improved Tunnel-FET inverter performance with SiGe/Si heterostructure nanowire TFETs by reduction of ambipolarity

Richter, S., Trellenkamp, S., Schäfer, A., Hartmann, J.M., Bourdelle, K.K., Zhao, Q.T., Mantl, S.

Journal:

Solid-State Electronics

Year:

2015

Language:

english

File:

PDF, 2.70 MB

english, 2015

2

Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

S. Brose, S. Danylyuk, L. Juschkin, C. Dittberner, K. Bergmann, J. Moers, G. Panaitov, St. Trellenkamp, P. Loosen, D. Grützmacher

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 1.03 MB

english, 2012

3

Influence of the epitaxial growth and device processing on the overlay accuracy during processing of the d-DotFET

J. Moers, J. Gerharz, G. Rinke, G. Mussler, St. Trellenkamp, D. Grützmacher

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 475 KB

english, 2010

4

20 nm Gate length Schottky MOSFETs with ultra-thin NiSi/epitaxial NiSi2 source/drain

L. Knoll, Q.T. Zhao, R. Luptak, S. Trellenkamp, K.K. Bourdelle, S. Mantl

Journal:

Solid-State Electronics

Year:

2012

Language:

english

File:

PDF, 1.02 MB

english, 2012

5

Si tunneling transistors with high on-currents and slopes of 50mV/dec using segregation doped NiSi2 tunnel junctions

Knoll, L., Schmidt, M., Zhao, Q.T., Trellenkamp, S., Schäfer, A., Bourdelle, K.K., Mantl, S.

Journal:

Solid-State Electronics

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

6

Silicon–germanium nanowire tunnel-FETs with homo- and heterostructure tunnel junctions

Richter, S., Blaeser, S., Knoll, L., Trellenkamp, S., Fox, A., Schäfer, A., Hartmann, J.M., Zhao, Q.T., Mantl, S.

Journal:

Solid-State Electronics

Year:

2014

Language:

english

File:

PDF, 2.36 MB

english, 2014

7

[IEEE ASDAM'02 (4th International Conference on Advanced Semiconductor Devices and Microsystems) - Smolenice Castle, Slovakia (14-16 Oct. 2002)] The Fourth International Conference on Advanced Semiconductor Devices and Microsystem - Thin low-temperature gate oxides for vertical field-effect transistors

Goryll, M., Moers, J., Trellenkamp, St., Vescan, L., Marso, M., Kordos, P., Luth, H.

Year:

2002

Language:

english

File:

PDF, 121 KB

english, 2002

8

[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Vertical double-gate MOSFETs

Moers, J., Trellenkamp, St., Marso, M., Hart, A.v.d., Mantl, S., Luth, H., Kordos, P.

Year:

2004

Language:

english

File:

PDF, 669 KB

english, 2004

9

Strained Si and SiGe Nanowire Tunnel FETs for Logic and Analog Applications

Zhao, Qing-Tai, Richter, Simon, Schulte-Braucks, Christian, Knoll, Lars, Blaeser, Sebastian, Luong, Gia Vinh, Trellenkamp, Stefan, Schafer, Anna, Tiedemann, Andreas, Hartmann, Jean-Michel, Bourdelle,

Journal:

IEEE Journal of the Electron Devices Society

Year:

2015

Language:

english

File:

PDF, 1.90 MB

english, 2015

10

[IEEE 2014 10th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Smolenice, Slovakia (2014.10.20-2014.10.22)] The Tenth International Conference on Advanced Semiconductor Devices and Microsystems - III-nitride nano-LEDs for single photon lithography

Trellenkamp, St., Mikulics, M., Winden, A., Arango, Y. C., Moers, J., Marso, M., Grutzmacher, D., Hardtdegen, H.

Year:

2014

Language:

english

File:

PDF, 2.65 MB

english, 2014

11

Complementary strained Si GAA Nanowire TFET inverter with suppressed ambipolarity

Luong, Gia Vinh, Narimani, Keyvan, Tiedemann, Andreas, Bernardy, Patric, Trellenkamp, Stefan, Zhao, Qing-Tai, Mantl, Siegfried

Journal:

IEEE Electron Device Letters

Year:

2016

Language:

english

File:

PDF, 890 KB

english, 2016

12

Nanowire Networks: Electronic Properties of Complex Self-Assembled InAs Nanowire Networks (Adv. Electron. Mater. 6/2016)

Heedt, Sebastian, Vakulov, Daniil, Rieger, Torsten, Rosenbach, Daniel, Trellenkamp, Stefan, Grützmacher, Detlev, Lepsa, Mihail Ion, Schäpers, Thomas

Journal:

Advanced Electronic Materials

Year:

2016

File:

PDF, 1.26 MB

2016

13

3-Ethylated N-Vinyl-2-pyrrolidone with LCST Properties in Water

Taina Trellenkamp, Helmut Ritter

Journal:

Macromolecular Rapid Communications

Year:

2009

Language:

english

File:

PDF, 278 KB

english, 2009

14

Electrical properties of Pt interconnects for passive crossbar memory arrays

R. Rosezin, C. Nauenheim, S. Trellenkamp, C. Kügeler, R. Waser

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 385 KB

english, 2009

15

A new approach to influence contact angle and surface free energy of resin-based dental restorative materials

Stefan Rüttermann, Taina Trellenkamp, Nora Bergmann, Wolfgang H.-M. Raab, Helmut Ritter, Ralf Janda

Journal:

Acta Biomaterialia

Year:

2011

Language:

english

File:

PDF, 254 KB

english, 2011

16

Resistively switching Pt/spin-on glass/Ag nanocells for non-volatile memories fabricated with UV nanoimprint lithography

M. Meier, S. Gilles, R. Rosezin, C. Schindler, S. Trellenkamp, A. Rüdiger, D. Mayer, C. Kügeler, R. Waser

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 361 KB

english, 2009

17

Observation of unipolar resistance switching in silver doped methyl-silsesquioxane

R. Rosezin, M. Meier, S. Trellenkamp, C. Kügeler, R. Waser

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 368 KB

english, 2010

18

Incident angle dependent damage of PMMA during Ar+-ion beam etching

Sandra Wolff, Bert Lägel, Stefan Trellenkamp

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 312 KB

english, 2010

19

Top contacts for vertical double-gate MOSFETs

J Moers, St Trellenkamp, M Goryll, M Marso, A van der Hart, S Hogg, S Mantl, P Kordoš, H Lüth

Journal:

Microelectronic Engineering

Year:

2002

Language:

english

File:

PDF, 398 KB

english, 2002

20

Wet low-temperature gate oxidation for nanoscale vertical field-effect transistors

M Goryll, J Moers, St Trellenkamp, L Vescan, M Marso, P Kordoš, H Lüth

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2003

Language:

english

File:

PDF, 171 KB

english, 2003

21

Comprehensive characterization of an individual carbon nanotube transport device

Robert Frielinghaus, Karin Goß, Stefan Trellenkamp, Lothar Houben, Claus M. Schneider, Carola Meyer

Journal:

physica status solidi (b)

Year:

2011

Language:

english

File:

PDF, 448 KB

english, 2011

22

Charge detection in a bilayer graphene quantum dot

Stefan Fringes, Christian Volk, Caroline Norda, Bernat Terrés, Jan Dauber, Stephan Engels, Stefan Trellenkamp, Christoph Stampfer

Journal:

physica status solidi (b)

Year:

2011

Language:

english

File:

PDF, 394 KB

english, 2011

23

Tunable capacitive inter-dot coupling in a bilayer graphene double quantum dot

Stefan Fringes, Christian Volk, Bernat Terrés, Jan Dauber, Stephan Engels, Stefan Trellenkamp, Christoph Stampfer

Journal:

physica status solidi (c)

Year:

2012

Language:

english

File:

PDF, 283 KB

english, 2012

24

Fabrication of silicon webs in the decananometre range

S. Trellenkamp, J. Moers, A. van der Hart, P. Kordoš, H. Lüth

Journal:

Applied Physics A: Materials Science & Processing

Year:

2004

Language:

english

File:

PDF, 420 KB

english, 2004

25

Reliable fabrication of 3 nm gaps between nanoelectrodes by electron-beam lithography

Manheller, Marcel, Trellenkamp, Stefan, Waser, Rainer, Karthäuser, Silvia

Journal:

Year:

2012

Language:

english

File:

PDF, 1.08 MB

english, 2012

26

Patterning of 25-nm-wide silicon webs with an aspect ratio of 13

St. Trellenkamp, J. Moers, A. van der Hart, P. Kordoš, H. Lüth

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 350 KB

english, 2003

27

Poly( N -vinylpyrrolidone) Bearing Covalently Attached Cyclodextrin via Click-Chemistry: Synthesis, Characterization, and Complexation Behavior with Phenolphthalein

Trellenkamp, Taina, Ritter, Helmut

Journal:

Year:

2010

Language:

english

File:

PDF, 1.20 MB

english, 2010

28

[IEEE 2012 13th International Conference on Ultimate Integration on Silicon (ULIS) - Grenoble, France (2012.03.6-2012.03.7)] 2012 13th International Conference on Ultimate Integration on Silicon (ULIS) - Nanowire and planar UTB SOI Schottky Barrier MOSFETs with dopant segregation

Knoll, L., Schafer, A., Trellenkamp, S., Bourdelle, K. K., Zhao, Q. T., Mantl, S.

Year:

2012

Language:

english

File:

PDF, 341 KB

english, 2012

29

Encapsulating graphene by ultra-thin alumina for reducing process contaminations

Dauber, Jan, Terrés, Bernat, Trellenkamp, Stefan, Stampfer, Christoph

Journal:

physica status solidi (b)

Year:

2012

Language:

english

File:

PDF, 405 KB

english, 2012

30

Hall effect measurements on InAs nanowires

Blömers, Ch., Grap, T., Lepsa, M. I., Moers, J., Trellenkamp, St., Grützmacher, D., Lüth, H., Schäpers, Th.

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 1.13 MB

english, 2012

31

Fabrication of coupled graphene–nanotube quantum devices

Engels, S, Weber, P, Terrés, B, Dauber, J, Meyer, C, Volk, C, Trellenkamp, S, Wichmann, U, Stampfer, C

Journal:

Year:

2013

Language:

english

File:

PDF, 1.54 MB

english, 2013

32

Etched graphene quantum dots on hexagonal boron nitride

Engels, S., Epping, A., Volk, C., Korte, S., Voigtländer, B., Watanabe, K., Taniguchi, T., Trellenkamp, S., Stampfer, C.

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.21 MB

english, 2013

33

Inverters With Strained Si Nanowire Complementary Tunnel Field-Effect Transistors

Knoll, Lars, Zhao, Qing-Tai, Nichau, Alexander, Trellenkamp, Stefan, Richter, Simon, Schafer, Anna, Esseni, David, Selmi, Luca, Bourdelle, Konstantin K., Mantl, Siegfried

Journal:

IEEE Electron Device Letters

Year:

2013

Language:

english

File:

PDF, 848 KB

english, 2013

34

Reducing disorder in graphene nanoribbons by chemical edge modification

Dauber, J., Terrés, B., Volk, C., Trellenkamp, S., Stampfer, C.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 1.99 MB

english, 2014

35

[IEEE 2013 Third Berkeley Symposium on Energy Efficient Electronic Systems (E3S) - Berkeley, CA, USA (2013.10.28-2013.10.29)] 2013 Third Berkeley Symposium on Energy Efficient Electronic Systems (E3S) - Strained Si nanowire tunnel FETs and inverters

Zhao, Q. T., Knoll, L., Richter, S., Schmidt, M., Blaeser, S., Luong, G. V., Wirths, S., Nichau, A., Schafer, A., Trellenkamp, S., Hartmann, J.-M., Bourdelle, K.K., Buca, D., Mantl, S.

Year:

2013

File:

PDF, 440 KB

2013

36

Optimized marker definition for high overlay accuracy e-beam lithography

Moers, J., Trellenkamp, St., Grützmacher, D., Offenhäusser, A., Rienks, B.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 705 KB

english, 2012

37

U-shaped bimorph micro-electromechanical cantilevers with combined thermal/electrostatic actuation

Panaitov, Gregory, Klein, Norbert, Trellenkamp, Stefan

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 805 KB

english, 2013

38

Improved LDMOS performance with buried multi-finger gates

Xu, Dawei, Cheng, Xinhong, Yu, Yuehui, Wang, Zhongjian, Cao, Duo, Xia, Chao, Liu, Linjie, Trellenkamp, Stefan, Mantl, Siegfried, Zhao, Qing-Tai

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.39 MB

english, 2014

39

[IEEE 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Stockholm, Sweden (2014.04.7-2014.04.9)] 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Tunnel-FET inverters for ultra-low power logic with supply voltage down to VDD = 0.2 V

Richter, S., Trellenkamp, S., Schafer, A., Hartmann, J. M., Bourdelle, K. K., Zhao, Q. T., Mantl, S.

Year:

2014

Language:

english

File:

PDF, 396 KB

english, 2014

40

$\Omega$-Gated Silicon and Strained Silicon Nanowire Array Tunneling FETs

Richter, S., Sandow, C., Nichau, A., Trellenkamp, S., Schmidt, M., Luptak, R., Bourdelle, K. K., Zhao, Q. T., Mantl, S.

Journal:

IEEE Electron Device Letters

Year:

2012

Language:

english

File:

PDF, 450 KB

english, 2012

41

Electronic Excited States in Bilayer Graphene Double Quantum Dots

Volk, C., Fringes, S., Terrés, B., Dauber, J., Engels, S., Trellenkamp, S., Stampfer, C.

Journal:

Year:

2011

Language:

english

File:

PDF, 4.01 MB

english, 2011

42

[IEEE 2012 12th International Workshop on Junction Technology (IWJT) - Shanghai (2012.05.14-2012.05.15)] 2012 12th International Workshop on Junction Technology - Planar and nanowire Schottky barrier MOSFETs on SOI with NiSi and epitaxial NiSi2 contacts

Zhao, Q. T., Knoll, L., Schafer, A., Trellenkamp, S., Bourdelle, K. K., Mantl, S.

Year:

2012

Language:

english

File:

PDF, 1.44 MB

english, 2012

43

Molecular junctions based on intermolecular electrostatic coupling

Yi, Zhiwei, Trellenkamp, Stefan, Offenhäusser, Andreas, Mayer, Dirk

Journal:

Chemical Communications

Year:

2010

Language:

english

File:

PDF, 1.18 MB

english, 2010

44

[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Low frequency noise in strained silicon nanowire array MOSFETs and Tunnel-FETs

Richter, S., Vitusevich, S., Pud, S., Li, J., Knoll, L., Trellenkamp, S., Schafer, A., Lenk, S., Zhao, Q. T., Offenhausser, A., Mantl, S., Bourdelle, K. K.

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

45

[IEEE 2013 14th International Conference on Ultimate Integration on Silicon (ULIS 2013) - Coventry (2013.3.19-2013.3.21)] 2013 14th International Conference on Ultimate Integration on Silicon (ULIS) - Si based tunnel field effect transistors: Recent achievements

Mantl, S., Knoll, L., Schmidt, M., Richter, S., Nichau, A., Trellenkamp, S., Schafer, A., Wirths, S., Blaeser, S., Buca, D., Qing-Tai Zhao,

Year:

2013

Language:

english

File:

PDF, 1.24 MB

english, 2013

46

[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Transport in kinked bi-layer graphene interconnects

Terres, Bernat, Borgwardt, Nick, Dauber, Jan, Volk, Christian, Engels, Stephan, Fringes, Stefan, Weber, Peter, Wichmann, Uwe, Stampfer, Christoph, Trellenkamp, Stefan

Year:

2011

Language:

english

File:

PDF, 2.32 MB

english, 2011

47

[IEEE 2011 Materials for Advanced Metallization (MAM) - Dresden, Germany (2011.05.8-2011.05.12)] 2011 IEEE International Interconnect Technology Conference - NiSi nano-contacts to strained and unstrained silicon nanowires

Habicht, S., Zhao, Q.T., Feste, S.F., Knoll, L., Trellenkamp, S., Bourdelle, K. K., Mantl, S.

Year:

2011

Language:

english

File:

PDF, 384 KB

english, 2011

48

[IEEE 2008 International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) - Smolenice, Slovakia (2008.10.12-2008.10.16)] 2008 International Conference on Advanced Semiconductor Devices and Microsystems - The disposable Dot Field Effect Transistor: Process flow and overlay requirements

Moers, J., Gerharz, J., Trellenkamp, St., Hart, A.v.d., Mussler, G., Gruitzmacher, D.

Year:

2008

Language:

english

File:

PDF, 799 KB

english, 2008

49

[IEEE 2009 10th International Conference on Ultimate Integration on Silicon (ULIS - Aachen, Germany (2009.03.18-2009.03.20)] 2009 10th International Conference on Ultimate Integration of Silicon - Phenomenological considerations of resistively switching TiO2 in nano crossbar arrays

Nauenheim, C., Kugeler, C., Trellenkamp, St., Rudiger, A., Waser, R.

Year:

2009

Language:

english

File:

PDF, 2.12 MB

english, 2009

50

[IEEE 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Stockholm, Sweden (2014.04.7-2014.04.9)] 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - High on-currents with highly strained Si nanowire MOSFETs

Luong, G. V., Knoll, L., Suess, M. J., Sigg, H., Schafer, A., Trellenkamp, S., Bourdelle, K. K., Buca, D., Zhao, Q. T., Mantl, S.

Year:

2014

Language:

english

File:

PDF, 439 KB

english, 2014

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